Objective To analyze the clinical value of oxygen saturation related diffusion index for monitoring oxygen and status in patients with acute respiratory distress syndrome(ARDS). Methods The enrolled cases were 130 patients with ARDS treated in the hospital from May 2017 to January 2020. The oxygen saturation related diffusion indexes were assessed and compared between patients with mild, moderate and severe ARDS. Results Of the 130 patients with ARDS, 38 were mild, accounting for 29.23%; 55 were moderate, accounting for 42.31%; and 37 were severe, accounting for 28.46%. Refers to oxygen saturation-related diffusion index, mild ARDS patients were significantly higher than moderate patients, moderate patients were significantly higher than severe patients(P＜0.05). Conclusion Finger oxygen saturation-related diffusion index has a negative correlation with the condition of patients with ARDS. Strengthening the monitoring of finger oxygen saturation-related diffusion index is of great significance for assessing the condition, treatment effect, and prognosis of ARDS patients.